The SEN 10GSD-A-160 is a reliable batch-type high-current ion implanter, a mature workhorse designed for high-dose doping of 150mm and 200mm wafers. It delivers powerful and stable beam current for source/drain doping, polysilicon doping and other high-concentration implant processes, supporting common dopants including boron, phosphorus and arsenic.
With optimized beamline optics and real-time dose monitoring, this implanter achieves superior within-wafer and wafer-to-wafer uniformity. Its batch rotary end station enables precise tilt and twist angle adjustment to reduce channeling effects, while advanced plasma shower technology minimizes particle generation and surface damage, ensuring consistent doping profiles under long continuous production cycles.
Highly recommended for power semiconductor, discrete device and sensor manufacturing. Thanks to its proven robust design, abundant spare parts supply and low maintenance cost, this implanter is an ideal option when you expand high-dose implant capacity or replace legacy equipment, helping your fab maintain high uptime and stable product yield.
SEN 10GSD-A-160 Main Specifications
| Manufacturer | SEN / Sumitomo Eaton Nova |
|---|---|
| Model | 10GSD-A-160 |
| Equipment Type | High-Current Ion Implanter |
| Supported Wafer Sizes | 150 mm and 200 mm, according to the available equipment listing |
| Implant Current Class | High current |
| Implant Energy Range | Must be confirmed from the installed high-voltage and beamline configuration |
| Ion Source | Source type, source-head components and approved species must be verified |
| Wafer End Station | Installed disk, cooling and implant-angle configuration must be confirmed |
| Dose Control | Installed Faraday, dose controller and calibration status must be inspected |
| Process Gases | Gas box, MFCs, safety equipment and dopant lines vary by machine |
| Control System | Controller hardware, operating software and recipe database must be confirmed |
| Condition | Used semiconductor equipment |
| Availability | Subject to current stock, inspection and configuration confirmation |
