The KLA Surfscan SP2 is a high-sensitivity unpatterned wafer inspection system for bare wafer and blanket film quality screening. Powered by UV laser darkfield optics, it captures tiny surface defects and haze maps for substrate qualification before lithography and deposition processes.
Fitted with high-speed scanning and multi-channel detection, it generates full-wafer defect maps rapidly. It pinpoints particles, scratches and surface anomalies, supporting inline monitoring in cleanroom production.
This mature inspection platform delivers consistent results with stable laser performance. It integrates smoothly into your substrate workflow to filter defective wafers and prevent costly yield loss in downstream fabrication.
KLA Surfscan SP2 Main Specifications
| Manufacturer | KLA-Tencor / KLA |
|---|---|
| Model | Surfscan SP2 |
| Equipment Type | Unpatterned Wafer Defect Inspection System |
| Supported Wafer Sizes | 200 mm and 300 mm |
| Inspection Technology | UV laser dark-field optical inspection |
| Published Sensitivity | Defects as small as approximately 37 nm under specified wafer and inspection conditions |
| Illumination Modes | Normal-incidence and oblique-incidence illumination |
| Inspectable Surfaces | Bare wafers, smooth and rough films, film stacks and photoresist layers |
| Data Capability | Defect mapping, classification and SURFimage surface-analysis data |
| Condition | Used semiconductor equipment |
| Availability | Subject to current stock, inspection and configuration confirmation |
