The KLA Tencor P-2 is a high-performance long-scan stylus profiler for micro/nano surface topography measurement in semiconductor and precision electronics production. It provides accurate 2D & 3D profiling on wafer thin films, etched features and packaging substrates, acting as a key metrology tool for process control and quality check.
Fitted with a sensitive low-force stylus and smart motion control, it supports long scans while retaining nanometer measurement precision. It reliably captures surface variations, step height and roughness defects. Strong anti-interference ensures stable, repeatable measurement data under factory operating conditions.
It is a proven metrology workhorse with easy calibration and low maintenance. Ideal for fab capacity upgrade or tool replacement, helping you tune processes and stabilize component surface quality.
KLA Tencor P-2 Main Specifications
| Manufacturer | KLA-Tencor |
|---|---|
| Model | P-2 |
| Equipment Type | Long-Scan Stylus Surface Profiler |
| Listed Sample Size | 150 mm / 6-inch |
| Maximum Scan Length | Approximately 210 mm |
| Published Scan Speed Range | Approximately 1 µm/s to 25 mm/s |
| High-Resolution Vertical Range | Approximately ±6.5 µm at 1 Å resolution |
| Extended Vertical Range | Approximately ±150 µm at 25 Å resolution |
| Maximum Profile Data | Up to approximately 5,000 data points per scan |
| Accessible Measurement Area | Up to approximately 210 mm diameter without sample repositioning |
| Maximum Sample Weight | Approximately 2.2 kg |
| Primary Measurements | Step height, roughness, waviness and surface profile |
| Condition | Used semiconductor equipment |
| Availability | Subject to current stock, inspection and configuration confirmation |
