When power device manufacturers require controlled wafer edge removal, the PVA TePla / Technics 660 serves as a dedicated microwave plasma etcher for edge isolation processing. Its 2.45GHz electrode-free microwave plasma eliminates surface leakage paths along the wafer rim, a critical step to boost breakdown voltage for silicon power chips.
Precision gas mass flow controllers and low-pressure vacuum environment deliver highly tunable edge etch depth. The rotating wafer stage ensures uniform removal around the full wafer perimeter while keeping damage to the active central device area to a minimum.
Unlike multi-purpose etch chambers, this system is purpose-built for edge isolation tasks. Its robust aluminium chamber design simplifies cleaning and part replacement, making it a cost-effective secondary process tool for mature power semiconductor production lines.
PVA TePla Technics 660 Main Specifications
| Manufacturer | PVA TePla / Technics |
|---|---|
| Model | 660 |
| Equipment Type | Low-Pressure Microwave Plasma Etching System |
| Configured Process | Solar Cell Edge Isolation Etching |
| Equipment Year | 2008, according to the available equipment listing |
| Recorded Operating Hours | 16 hours, according to the available equipment listing |
| Plasma Frequency | 2.45 GHz |
| Microwave Power | 0–1,000 W |
| Process Chamber Material | Aluminum |
| Chamber Volume | 64 L |
| Chamber Inner Dimensions | 400 × 400 × 400 mm |
| Installed Process Gas Inputs | Three MFC-controlled gas inputs, according to the equipment listing |
| Stage | 350 mm diameter stage option, according to the equipment listing |
| Vacuum Connection | DN 63 ISO K |
| Base Pressure | Approximately 2 × 10-2 mbar |
| Process Pressure | Approximately 0.2–2 mbar |
| Evacuation Time | Approximately 1 minute |
| Included Vacuum Pump | EBARA oil-free dry pump, according to the equipment listing |
| Electrical Supply | 230 V, single-phase, 16 A, 50/60 Hz |
| Approximate Dimensions | 1,050 × 1,720 × 770 mm |
| Approximate Weight | 180 kg, excluding the vacuum pump |
| Condition | Used semiconductor equipment |
| Availability | Subject to current stock, inspection and configuration confirmation |
