The GIGA 690 from PVA TePla / Technics leverages microwave plasma technology, separating it from conventional RF plasma tools. Primarily deployed for high-volume photoresist stripping and wafer surface treatment, this batch system handles 6-inch wafers widely in power semiconductor and discrete device factories.
With electrode-free plasma generation, it avoids metallic contamination. Carefully regulated oxygen chemistry enables fast yet gentle organic ashing, preserving sensitive thin films and device structures while clearing resist and polymer residues efficiently.
Its high-throughput batch chamber design maximizes wafer capacity per run. As a well-established second-hand platform, spare parts remain available, bringing reliable plasma processing capability at a competitive investment for expanding fab production lines.
PVA TePla GIGA 690 Main Specifications
| Manufacturer | PVA TePla / Technics |
|---|---|
| Model | GIGA 690 |
| Equipment Type | Low-Pressure Microwave Plasma Cleaning and Activation System |
| Equipment Year | 2010, according to the available equipment listing |
| Process Chamber Material | Aluminum |
| Chamber Volume | 91 L |
| Chamber Inner Dimensions | 450 × 450 × 450 mm |
| Plasma Frequency | 2.45 GHz |
| Microwave Power | 0–1,000 W |
| Standard Gas Channels | Two channels, each with a mass flow controller and solenoid valve |
| Vacuum Connection | DN 63 ISO K |
| Base Pressure | Approximately 2 × 10-2 mbar |
| Process Pressure | Approximately 0.2–2 mbar |
| Evacuation Time | Approximately 1 minute |
| System Control | PC-based controller with 10.4-inch graphical display |
| Operating System | QNX real-time operating system |
| Electrical Supply | 230 V, single-phase, 15 A, 50/60 Hz |
| Process Gas Supply | 1/4-inch Swagelok connection, 1–2 bar input pressure |
| Compressed Air Supply | 1/4-inch Swagelok connection, 4–6 bar input pressure |
| Approximate Dimensions | 1,050 × 1,750 × 800 mm |
| Approximate Weight | 195 kg, system only and excluding the vacuum pump |
| Condition | Used semiconductor equipment |
| Availability | Subject to current stock, inspection and configuration confirmation |
