Looking for reliable 300mm single wafer cleaning solution for your advanced fab process? The SEMES BLUEICE PRIME is a high-performance wet cleaning platform built for cutting-edge logic and memory manufacturing.
This single-wafer cleaner delivers exceptional temperature uniformity and precise chemical control, excelling at high-temperature phosphoric acid etching and stripping tasks. Its proprietary chuck design minimizes thermal deviation, effectively removing surface contaminants while protecting delicate wafer patterns from damage.
It supports flexible recipe tuning for multiple wet processes, maintaining ultra-low defect rates even under long-run mass production. Whether you upgrade existing wet stations or expand production capacity, this system is a proven workhorse to lift your wafer yield.
Reach out to us today to discuss your wet cleaning requirements and get a competitive quotation.
SEMES BLUEICE PRIME Technical Specifications
| Parameter | Description |
|---|---|
| Equipment Type | Single wafer cleaning system |
| Manufacturer | SEMES |
| Model | BLUEICE PRIME |
| Wafer Size | 300mm |
| Process Type | Wet wafer cleaning |
| Main Application | Logic and memory semiconductor manufacturing |
| Cleaning Technology | High temperature phosphoric acid cleaning |
| Target | Particles, residues, surface contamination |