The ACCRETECH / TSK UF3000EX is an industry-benchmark fully automatic wafer prober engineered for high-precision electrical characterization and high-mix, high-volume production. Built on the renowned TSK UF3000 series architecture, the UF3000EX provides outstanding wafer sort capability, precise sub-micron positioning, and reliable optical alignment across both 200mm and 300mm wafer formats.
At GK-SEMI, we provide production-ready used TSK prober stations that have passed rigorous multi-point functionality tests, vacuum seal diagnostics, and optical calibration, offering a cost-effective alternative to purchasing new equipment.
Technical Specifications: TSK UF3000EX
| Parameter | Configuration Details |
|---|---|
| Manufacturer | Tokyo Seimitsu Co., Ltd. (ACCRETECH / TSK) |
| Model Series | UF3000 / UF3000EX |
| Wafer Diameter | 200 mm (8-inch) & 300 mm (12-inch) dual handling |
| Alignment Accuracy | Optical Target Scope (OTS), ±2.0 µm or better |
| Chuck Temperature | Ambient / Hot Chuck / Tri-Temp (-55°C to +150°C / +200°C) |
| Probe Card Size | Up to 440 mm (17.3-inch) standard interface |
| Stage Drive | High-rigidity quad-axis Z-stage with low contact force control |
| Automation Network | SECS/GEM, Light-VegaNet, VegaNet, Ethernet |
Key Advantages of the Accretech Prober Platform
High Indexing Velocity: Maximizes test throughput with ultra-fast XY motion and automated wafer transfer.
Low Contact Force Protection: Micro-step Z-drive prevents damage to sensitive wafer surfaces, pads, and low-k materials.
Universal ATE Compatibility: Effortless docking with major tester heads (Advantest, Teradyne, etc.).
GK-SEMI Certified Inspection & Packaging
Every accretech uf3000 delivered by GK-SEMI undergoes complete stage testing, motor drive diagnostics, thermal calibration, and vacuum leak verification. All units are vacuum sealed with desiccant in cleanroom-grade packaging and crated in heavy-duty wooden boxes for safe international transit.
Frequently Asked Questions
Q: Can this TSK UF3000EX handle both 8-inch and 12-inch wafers?
A: Yes. The system supports dual wafer diameter operations with the appropriate conversion kits and chuck configurations.
Q: Do you offer live machine power-on video inspection?
A: Yes, we provide full video documentation demonstrating wafer exchange, optical alignment, and system self-tests before shipment.
